Electron-beam-induced nitrogen migration through a nitrided silicon dioxide thin film

✍ Scribed by V. Garcia; A. Glachant; R. Pantel; A. Straboni

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 526 KB
• Volume: 74
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90298-4