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Electron-Beam-Induced Nanometer-Scale Deposition

✍ Scribed by Natalia Silvis-Cividjian and Cornelis W. Hagen (Eds.)


Publisher
Elsevier, Academic Press
Year
2006
Tongue
English
Leaves
263
Series
Advances in Imaging and Electron Physics 143
Edition
1
Category
Library

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✦ Synopsis


Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

✦ Table of Contents


Content:
Electron‐Beam–Induced Nanometer‐Scale Deposition Review Article
Pages 1-235
Natalia Silvis-Cividjian, Cornelis W. Hagen

Series Editors
Page II

Index
Pages 237-247

Contents
Page V

Future Contributions
Pages IX-XIII

Foreword
Page XV

Preface
Page VII


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