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Electron beam evaporated LaF3 thin films prepared by different temperatures and deposition rates

โœ Scribed by Guanghui Liu; Hongbo He; Yunxia Jin; Zhengxiu Fan


Book ID
108064186
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
537 KB
Volume
256
Category
Article
ISSN
0169-4332

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Indium tin oxide thin films prepared by
โœ Meng, Lijian ;Gao, Jinsong ;Teixeira, V. ;dos Santos, M. P. ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 664 KB

## Abstract Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80โ€“120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion