The 'DataFurnace' code, based on the simulated annealing algorithm, was used to extract elemental depth profiles from Rutherford backscattering spectra of 4-layer and 21-layer anti-reflection coatings and a 22layer narrow-bandpass filter (respectively 240, 1140 and 800 nm thick). The layers are on a
β¦ LIBER β¦
Electron beam and optical depth profiling of quasibulk GaN
β Scribed by Chernyak, L.; Osinsky, A.; Nootz, G.; Schulte, A.; Jasinski, J.; Benamara, M.; Liliental-Weber, Z.; Look, D. C.; Molnar, R. J.
- Book ID
- 120325425
- Publisher
- American Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 412 KB
- Volume
- 77
- Category
- Article
- ISSN
- 0003-6951
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