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Electron and laser radiation as sources of zirconia film deposition

โœ Scribed by E.W. Kreutz; O. Lemmer; D.A. Wesner; M. Alunovic; G. Erkens; T. Leyendecker; A. Voss


Book ID
107930543
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
758 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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Thin films of yttria-stabilized zirconia (YSZ) were formed onto nickel oxide substrates by an electrochemical vapor deposition process using the substrates as oxygen sources, and ZrCl, and YCl, as metal sources. After deposition at 1000ยฐC for l-6 h, dense films of cubic YSZ were formed. The film thi