Electromigration and ohmic contact properties of the magnetron-sputtered Al2%Si alloy films: Eiji Nagasawa and Hidekazu Okabayashi. NEC Research and Development, No. 59, p. 1 (October 1980)

Electromigration and ohmic contact prope

Electromigration and ohmic contact properties of the magnetron-sputtered Al-2%Si alloy films: Eiji Nagasawa and Hidekazu Okabay Yashi NEC Research and Development, 59, p. 1 (October 1980)

📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 101 KB

microwave characterisation based on the S parameter theory, which is commonly used in the circuit design, are described. Microstrip de-embedding techniques have been developed to shift the calibration planes of an automatic network analyser up to the device. This enables an accurate large signal GaA