Electromigration and ohmic contact properties of the magnetron-sputtered Al-2%Si alloy films: Eiji Nagasawa and Hidekazu Okabay Yashi NEC Research and Development, 59, p. 1 (October 1980)

• Book ID: 104157068
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 101 KB
• Volume: 14
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(83)80186-4

✦ Synopsis

microwave characterisation based on the S parameter theory, which is commonly used in the circuit design, are described. Microstrip de-embedding techniques have been developed to shift the calibration planes of an automatic network analyser up to the device. This enables an accurate large signal GaAs PET characterisation.

Mieroelectronie test structures for characterising fine-line lithography