Electromechanical resonator in scanning microdeformation microscopy: theory and experiment

✍ Scribed by Vairac, P.; Cretin, B.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 113 KB
• Volume: 27
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199905/06)27:5/6<588::aid-sia479>3.0.co;2-x

✦ Synopsis

BesancÓ on

We have studied, both theoretically and experimentally, the dynamic behaviour of an electromechanical resonator, which is the probe head of our scanning microdeformation microscope (SMM). The SMM is a form of contact a.c. force microscope using a tip mounted at the end of a silicon cantilever, which vibrates in contact with the sample. A new model, which takes into account the normal and tangential sti †ness of the tip-sample contact, but also the geometry of the tip, is proposed. Experimental investigations into the vibration shapes of the cantilever performed with a highly sensitive optical probe conÐrm the realistic behaviour of our model. The Ðtted theoretical results are in good agreement with experiments. Associated with this model, scanning microdeformation microscopy seems an attractive technique for the quantitative measurement of local material properties.