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Determination of the observation depth in scanning microdeformation microscopy

✍ Scribed by Robert, L.; Cretin, B.

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
146 KB
Volume
27
Category
Article
ISSN
0142-2421

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✦ Synopsis

Scanning microdeformation microscopy is a kind of a.c. contact force microscopy that can image the subsurface of the investigated sample. This paper presents a Ðrst step to determine experimentally the investigation depth of this near-Ðeld acoustic method. A set of silicon samples with well-known chemically etched grooves has been imaged and the experimental contrast has been related to the basic theory of the hertzian contact. It is shown that the contrast is essentially related to the contact radius and to the sample geometry. A heuristic model is proposed to explain the origin of the observed contrast.

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