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Electromagnetic modeling and parameter extraction of RF-MEMS switch

✍ Scribed by Sharma, Ashish Kumar; Gupta, Navneet


Book ID
125349095
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
490 KB
Volume
21
Category
Article
ISSN
0946-7076

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf