Electrochemical reliability of plasma-polymerized cyclohexane films deposited on copper in microelectronic devices

✍ Scribed by Z.-T. Park; Y.-S. Choi; J.-G. Kim; J.-H. Boo

• Book ID: 111544019
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 171 KB
• Volume: 22
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1023/a:1024679906737