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Electrochemical etching of macropores in silicon with grooved etch seeds

✍ Scribed by E. V. Astrova; A. A. Nechitaĭlov

Book ID
111444062
Publisher
Springer
Year
2008
Tongue
English
Weight
886 KB
Volume
42
Category
Article
ISSN
1063-7826

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✍ Astrova, E. V. ;Nechitailov, A. A. ;Tolmachev, V. A. ;Melnikov, V. A. ;Perova, T 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 470 KB

## Abstract Role of linear nucleation centres (surface grooves) in formation of macro‐pores has been studied for n‐type Si. It has been found that linear nucleation centres, contrary to the case of point nucleation pits, initiate formation of semi‐regular pore pattern: along the grooves the pores a