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Electrochemical atomic layer deposition of copper nanofilms on ruthenium

✍ Scribed by Daniel K. Gebregziabiher; Youn-Geun Kim; Chandru Thambidurai; Valentina Ivanova; Paul-Henri Haumesser; John L. Stickney


Book ID
108166003
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
414 KB
Volume
312
Category
Article
ISSN
0022-0248

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