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Electrochemical Atomic Layer Deposition (E-ALD) of Pt Nanofilms Using SLRR Cycles

✍ Scribed by Jayaraju, N.; Vairavapandian, D.; Kim, Y. G.; Banga, D.; Stickney, J. L.

Book ID: 119973983
Publisher: The Electrochemical Society
Year: 2012
Tongue: English
Weight: 759 KB
Volume: 159
Category: Article
ISSN: 0013-4651
DOI: 10.1149/2.053210jes

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