Electrochemical Atomic Layer Deposition (E-ALD) of Palladium Nanofilms by Surface Limited Redox Replacement (SLRR), with EDTA Complexation

✍ Scribed by Sheridan, Leah B.; Czerwiniski, Justin; Jayaraju, Nagarajan; Gebregziabiher, Daniel K.; Stickney, John L.; Robinson, David B.; Soriaga, Manuel P.

• Book ID: 113108756
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 499 KB
• Volume: 3
• Category: Article
• ISSN: 1868-2529
• DOI: 10.1007/s12678-012-0080-7