Electro, thermal and elastic characterizations of suspended micro beams

✍ Scribed by Liwei Lin; Mu Chiao

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 440 KB
• Volume: 29
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(97)00066-9

✦ Synopsis

An electro-thermal-elastic model for characterizing thermal buckling behavior of rrficromachined beams has been developed. These micro beams are made of heavily phosphorus-doped polysi]icon by surface micromachining technology. When electrically self-heated, the clampedclamped beams may buckle under high compressive thermal stresses. The electro-thermal and thermal-elastic responses have been analyzed separately to establish the overall electro-thermal-elastic characteristics.

It is predicted that a 2/am wide, 2.2/am thick and 100#m long clamped-clamped suspended micro beam will buckle under a 6 mA input current. The lateral deflection is about 2.7/am at the center of the beam. The analytical results are consistent with experirnental observations.