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Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

✍ Scribed by L. Mele; T. Rossi; M. Riccio; E. Iervolino; F. Santagata; A. Irace; G. Breglio; J.F. Creemer; P.M. Sarro

Book ID
119355579
Publisher
Elsevier
Year
2011
Tongue
English
Weight
638 KB
Volume
25
Category
Article
ISSN
1877-7058

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✍ Coccetti, F. ;Plana, R. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 300 KB

## Abstract An experimental setup for the characterization of electromagnetically induced heat on MEMS devices operating in high RF power regimes (> 5 W) is here proposed. The technique is based on infrared (IR) imaging of on‐probe DUT, in working conditions. The present work focuses on switches. U