Electrically insulated smart sensors: Principles for operation and supply

Electrically insulating Al2O3 and SiO2 f

Electrically insulating Al2O3 and SiO2 films for sensor and photovoltaic applications deposited by reactive pulse magnetron sputtering, hollow cathode arc activated deposition and magnetron-PECVD

✍ P. Frach; H. Bartzsch; D. Glöß; M. Fahland; F. Händel 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 380 KB

## Pressure sensor CIS/CIGS photovoltaics Electrically insulating films find wide applications in electronics, sensor and medical technology as well as in photovoltaics. This paper describes the deposition of Al 2 O 3 and SiO 2 films using reactive pulse magnetron sputtering, hollow cathode arc act