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Electrically driven silicon resonant light emitting device based on slot-waveguide

โœ Scribed by Barrios, Carlos Angulo; Lipson, Michal

Book ID
115405828
Publisher
Optical Society of America
Year
2005
Tongue
English
Weight
331 KB
Volume
13
Category
Article
ISSN
1094-4087

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In this paper we report the visible-near-infrared light emission properties of nanocrystalline silicon (nc-Si) light emitting devices (LEDs) based on nc-Si/SiO 2 multilayer structures. Multilayer structures of silicon-rich oxide (SRO) and SiO 2 were grown by plasma enhanced chemical vapor deposition