Electrically Benign Ru Wet Etching Method for Fabricating Ru∕TiO[sub 2]∕Ru Capacitor

✍ Scribed by Lee, Sang Young; Kim, Seong Keun; Kim, Kyung Min; Choi, Gyu-Jin; Han, Jeong Hwan; Hwang, Cheol Seong

• Book ID: 124168171
• Publisher: The Electrochemical Society
• Year: 2011
• Tongue: English
• Weight: 301 KB
• Volume: 158
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.3530789