Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes

✍ Scribed by Kim, Kyung Min; Lee, Sang Young; Choi, Gyu Jin; Han, Jeong Hwan; Hwang, Cheol Seong

• Book ID: 121364179
• Publisher: The Electrochemical Society
• Year: 2010
• Tongue: English
• Weight: 328 KB
• Volume: 13
• Category: Article
• ISSN: 1099-0062
• DOI: 10.1149/1.3247971