Electrical resistivity and surface profile due to Al/Si/Ti reaction kinetics on an oxidised silicon wafer

✍ Scribed by A. Singh

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 197 KB
• Volume: 18
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(87)80404-4

✦ Synopsis

Electrical resistivity and surface profile due to AI/Si/Ti reaction kinetics on an oxidised silicon wafer