Electrical resistivity and surface profile due to Al/Si/Ti reaction kinetics on an oxidised silicon wafer : A. Singh. Microelectron. J. 18 (2), 15 (1987)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 122 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90853-5