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Electrical properties of TiO2 thin films

โœ Scribed by A. Yildiz; S.B. Lisesivdin; M. Kasap; D. Mardare


Book ID
116671439
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
188 KB
Volume
354
Category
Article
ISSN
0022-3093

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The structural and electrical properties
โœ P. Chowdhury; Harish C. Barshilia; N. Selvakumar; B. Deepthi; K.S. Rajam; Ayan R ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 515 KB

Thin films of TiO 2 were grown on n-type Si substrate by thermal oxidation of Ti films deposited by dc sputtering. The phase purity of TiO 2 was confirmed by Raman spectroscopy, and secondary ion mass spectroscopy was used to analyze the interfacial and chemical composition of the TiO 2 thin films.