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Electrical properties of thin nanocrystalline diamond based structures

✍ Scribed by Parr, M.D.; Reinhard, D.K.

Book ID
122213093
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
192 KB
Volume
15
Category
Article
ISSN
0925-9635

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## Abstract The structural, optical, and electronic properties of nanocrystalline diamond thin films grown from a hydrogen‐rich CH~4~/H~2~ gas phase via hot filament (HF) CVD and of ultrananocrystalline diamond thin films grown from an argon‐rich sp^2^ gas phase via microwave plasma enhanced (MPE)