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Electrical properties of surface conductive layers of homoepitaxial diamond films

✍ Scribed by Jiang, Nan; Ito, Toshimichi


Book ID
120365734
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
359 KB
Volume
85
Category
Article
ISSN
0021-8979

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Electrical conduction of high-conductivi
✍ S Yamanaka; D Takeuchi; H Watanabe; H Okushi; K Kajimura πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 185 KB

In order to clarify the origin of high-conductivity layers HCL near the surfaces of hydrogenated diamond films, we have Ε½ . studied the relationship between HCL and surface structure in B-doped homoepitaxial 001 diamond films. Samples annealed in nitrogen environment at various temperatures have bee