𝔖 Bobbio Scriptorium

✦ LIBER ✦

Electrical properties of SiSiO2 structures treated in helium plasma : J. Kassabov, E. Atanassova, D. Dimittrov and E. Goranova. Microelectron. J.18(5), 5 (1987)

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 137 KB
Volume: 29
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(89)90512-x

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