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Electrical properties of co-sputtered tantalum silicides

✍ Scribed by J. Denis; M. Fernández; J.P. González; J.M. Albella; J.M. Martínez-Duart


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
486 KB
Volume
125
Category
Article
ISSN
0040-6090

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