Electrical properties, microstructure, and thermal stability of Ta-based ohmic contacts annealed at low temperature for GaN HEMTs

✍ Scribed by Malmros, A; Blanck, H; Rorsman, N

• Book ID: 115484101
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 751 KB
• Volume: 26
• Category: Article
• ISSN: 0268-1242
• DOI: 10.1088/0268-1242/26/7/075006