Electrical Properties and Leakage Current Mechanisms of
โ Scribed by C. C. Yu; M. C. Kao; H. Z. Chen; S. L. Young; C. H. Lin
- Publisher
- Springer
- Year
- 2010
- Tongue
- English
- Weight
- 452 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0896-1107
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The effect of oxygen partial pressure (OPP) on the leakage current density of Bi 5 Nb 3 O 15 (B 5 N 3 ) films grown on Pt electrodes was investigated. The leakage current density was very high for the film grown under a low OPP of 1.7 mTorr, but was significantly reduced by the subsequent annealing