Electrical profiles of 20 nm junctions in Sb implanted silicon

✍ Scribed by T. Alzanki; R. Gwilliam; N. Emerson; A. Smith; R. Webb; B.J. Sealy

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 152 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.091