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Electrical conductivity behaviour of thin in situ phosphorus doped VLPCVD polysilicon films

✍ Scribed by M. Mokhtari; B. Fortin; O. Bonnaud; A. Liba; M. Sarret

Book ID: 113300238
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 486 KB
Volume: 33
Category: Article
ISSN: 0254-0584
DOI: 10.1016/0254-0584(93)90106-v

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