Electrical characterization of oxide in MOS devices using low energy electron beam filling of traps : P. Charpenel, P. Girard and F. M. Roche. Microelectronics Journal, 24, 377 (1993)

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 73 KB
• Volume: 34
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(94)90445-6