Electrical characterization and process control of cost-effective high-k aluminum oxide gate dielectrics prepared by anodization followed by furnace annealing

✍ Scribed by Szu-Wei Huang; Jenn-Gwo Hwu

• Book ID: 114617142
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 382 KB
• Volume: 50
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2003.813904