Electrical characteristics of sputtering-induced defects in n-type silicon : L. P. Andersson and A. O. Evwaraye. Vacuum28, (1) 5

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 127 KB
• Volume: 17
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(78)90941-1