3676. Electrical characteristics of sputtering-induced defects in n-type silicon: L P Andersson and A O Evwaraye, Vacuum, 28 (1), 1978, 6–7

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 141 KB
• Volume: 28
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(78)90048-9