Electrical characteristics of scaled CMOSFET's with source/drain regions fabricated by 7° and 0° tilt-angle implantations

✍ Scribed by Ohzone, T.; Yamamoto, M.; Iwata, H.; Odanaka, S.

• Book ID: 114536010
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 746 KB
• Volume: 42
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.370033