Electrical characteristics of 0°/±45°/90°-orientation CMOSFET with source/drain fabricated by various ion-implantation methods

✍ Scribed by Matsuda, T.; Okina, M.; Ohzone, T.

• Book ID: 114537674
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 370 KB
• Volume: 46
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.753704