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Electrical Characteristics of ${\rm Al}_{2}{\rm O}_{3}/{\rm InSb}$ MOSCAPs and the Effect of Postdeposition Annealing Temperatures

✍ Scribed by Trinh, Hai Dang; Lin, Yueh Chin; Chang, Edward Yi; Lee, Ching-Ting; Wang, Shin-Yuan; Nguyen, Hong Quan; Chiu, Yu Sheng; Luc, Quang Ho; Chang, Hui-Chen; Lin, Chun-Hsiung; Jang, Simon; Diaz, Carlos H.

Book ID: 125469341
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 809 KB
Volume: 60
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2013.2254119

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