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Electrical characteristics of palladium silicide

✍ Scribed by M. Wittmer; D.L. Smith; P.W. Lew; M.-A. Nicolet


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
696 KB
Volume
21
Category
Article
ISSN
0038-1101

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Effects of capping layers on the electri
✍ Chi-Chang Wu; Wen-Fa Wu; P.Y. Su; L.J. Chen; Fu-Hsiang Ko πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 621 KB

In this paper, effects of capping layers on formation and electrical properties of Ni-silicided junctions have been investigated. Nickel silicide films using the Ti or TiN-capped layer process are used to compare to those by the uncapped process. The uncapped (Ni single layer) and TiN-capped samples