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Electrical characteristics of gallium arsenide “real” surfaces

✍ Scribed by Theodoros M. Valahas; Jerzy S. Sochanski; Harry C. Gatos


Book ID
118980160
Publisher
Elsevier Science
Year
1971
Tongue
English
Weight
761 KB
Volume
26
Category
Article
ISSN
0039-6028

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Ellipsometric analysis of gallium arseni
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## Abstract In this paper the methods of immersion ellipsometry and multiple angle of incidence ellipsometry are used for analyzing gallium arsenide single crystals covered with very thin oxide layers growing under normal laboratory conditions. The values of all the optical parameters of the system