Electrical and optical properties of phosphorous nitride films formed on InP substrates with photon-assisted chemical vapour deposition

✍ Scribed by Y. Matsumoto; T. Hanajiri; T. Sugano; Le.T.T. Tuyen; T. Katoda

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 614 KB
• Volume: 269
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)06854-6