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Electrical and optical properties of p-type silicon based on polypyrrole-derivative polymer

✍ Scribed by Ahmet Faruk Özdemir; Sinem Gürkan Aydin; Durmuş Ali Aldemir; Songül Şen Gürsoy

Book ID
116899310
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
391 KB
Volume
161
Category
Article
ISSN
0379-6779

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ZnO films were grown on Si(100) and quartz substrates by inductively coupled plasma assisted chemical vapor deposition (ICP-CVD), using metal organic DEZ (diethlyzinc), and a gas mixture of Ar and O 2 . The process temperature ranged between room temperature and 400 °C. ZnO films showed both p-and n