Electrical and optical properties of ITO and ITO:Zr transparent conducting films
β Scribed by Bo Zhang; Xianping Dong; Xiaofeng Xu; Xinjian Wang; Jiansheng Wu
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 781 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1369-8001
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Pb(Zr,Ti)O 3 thin films were successfully prepared on a Pt bottom electrode with indium tin oxide coated glass substrates using RF magnetron sputtering. Use of the indium tin oxide coated glass substrate reduced the fatigue characteristics and provided for excellent crystallization of the Pb(Zr,Ti)O
Transparent conductive indium tin oxide (ITO) thin films were deposited on transparent flexible clay films with heat resistant and high gas barrier properties by rf magnetron sputtering. The electrical, structural, and optical properties of these films were examined as a function of deposition tempe