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Electrical and optical properties dependence on evolution of roughness and thickness of Ga:ZnO films on rough quartz substrates

โœ Scribed by Yun-yan Liu; Shan-ying Yang; Gong-xiang Wei; Hong-sheng Song; Chuan-fu Cheng; Chen-shan Xue; Yu-zhen Yuan

Book ID
108278737
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
766 KB
Volume
205
Category
Article
ISSN
0257-8972

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of