Electrical and optical characterization of n-type ZnO thin films
β Scribed by K. Yoshino; T. Hata; T. Kakeno; H. Komaki; M. Yoneta; Y. Akaki; T. Ikari
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 70 KB
- Volume
- 0
- Category
- Article
- ISSN
- 1862-6351
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ZnO films were grown on Si(100) and quartz substrates by inductively coupled plasma assisted chemical vapor deposition (ICP-CVD), using metal organic DEZ (diethlyzinc), and a gas mixture of Ar and O 2 . The process temperature ranged between room temperature and 400 Β°C. ZnO films showed both p-and n
## Abstract ZnO thin films were prepared by spray pyrolytic decomposition of zinc acetate onto a glass substrate. These films were analyzed for the optical and electrical properties. Optical studies show that in these films the electronic transition is of the direct transition type. The optical ene