Electrical and mechanical properties of layered gold–chromium thin films for ohmic contacts in RF-MEMS switches

✍ Scribed by V. Mulloni; R. Bartali; S. Colpo; F. Giacomozzi; N. Laidani; B. Margesin

• Book ID: 108215663
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 709 KB
• Volume: 163
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2009.06.004