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Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS

✍ Scribed by S. W. Cho; I. Chasiotis

Book ID: 106574079
Publisher: Sage Publications
Year: 2006
Tongue: English
Weight: 854 KB
Volume: 47
Category: Article
ISSN: 0014-4851
DOI: 10.1007/s11340-006-0405-7

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