Efficient modeling parameter extraction for dual pearson approach to simulation of implanted impurity profiles in silicon

✍ Scribed by Changhae Park; Kevin M. Klein; Al F. Tasch

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 485 KB
• Volume: 33
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(90)90176-f