Efficient modeling parameter extraction for dual Pearson approach to simulation of implanted impurity profiles in silicon : Changhae Park, Kevin M. Klein and Al. F. Tasch. Solid-St. Electron.33(6), 645 (1990)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 262 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90228-d